Plasma Etching Equipment Market Size & Share Analysis - Growth Trends & Forecasts (2025 - 2030)

The Global Plasma Etching Equipment Market is segmented by Type (Reactive Ion Etching, Inductively Coupled Plasma Etching, Deep Reactive Ion Etching), Application (Consumer, Industrial, Medical), and Geography.

Plasma Etching Equipment Market Size

Plasma Etching Equipment Market Size

Compare market size and growth of Plasma Etching Equipment Market with other markets in Technology, Media and Telecom Industry

Plasma Etching Equipment Market Analysis

The Plasma Etching Equipment Market is expected to register a CAGR of 7.8% during the forecast period.

  • Plasma etching is a sophisticated, versatile technology that creates a wide range of devices. Today, semiconductor manufacturers are switching to the plasma etch system from traditional wet etching, as it consumes fewer chemicals and is more suitable for automation and single wafer manufacturing. Increasing demand for compact, energy-efficient electronic devices having improved performance is boosting the need for developing miniature semiconductor integrated circuits (ICs). For miniaturizing IC, the course has to undergo an advanced circuit fabrication process with small geometries and thus requires precise pattern transfer.
  • Plasma etching is used extensively in the semiconductor and microelectromechanical systems industries. For instance, in manufacturing printed circuit boards (PCBs), isotropic etching is used to plasma clean circuits after machining and before electroplating. Anisotropic etching is used to form circuit patterns in wafers. This anisotropic plasma etching is highly energetic and called reactive ion etching (RIE).
  • Moreover, massive technological upgradation taking place in the IoT application to offer technologically advanced intelligent devices to different consumers across the globe is also predicted to accelerate the demand for advanced semiconductors, thereby positively affecting the market's growth. With the growth in IoT applications, smart devices are increasing, giving rise to miniature semiconductors, thus raising the demand for plasma etching.
  • Smartphones and other applications that require semiconductor ICs are other factors driving the overall demand for plasma etching in consumer electronics, automotive, and other industries, as technology advancements like wireless technologies (5G) and artificial intelligence have significantly impacted the trend of these sectors. Also, the increasing number of Internet of Things (IoT) devices is expected to force the semiconductor industry to invest in this equipment to attain intelligent products. The SEMI Silicon Manufacturers Group (SMG) revealed in its quarterly review of the silicon wafer industry that worldwide silicon wafer shipments grew 3.3% to 3,649 million square inches in the third quarter of 2021, which was a new industry high. Shipments of silicon wafers in the third quarter of 2021 increased by 16.4% over the same quarter the previous year, to 3,135 million square inches.
  • However, this equipment is often costlier than wet-chemical etching equipment. Also, due to faster consumption of resists due to wet chemical etching, the selectivity offered by this equipment is reduced compared to wet-chemical etching equipment. These are some of the primary factors challenging the growth of the market.
  • The COVID-19 pandemic halted the manufacturing of several items in the semiconductor production equipment industry, owing to continued lockdown in most regions across the world. Lockdown measures reduced demand for consumer electronic gadgets, which had a global impact on the semiconductor sector. The continued decline in worldwide demand and export shipments for automobiles provided a negative impact on the semiconductor market, which is currently slowing the demand for semiconductor manufacturing equipment. However, the demand is expected to gain traction gradually with the industrial activities returning back to the pre-pandemic level.

Plasma Etching Equipment Industry Overview

The plasma etching equipment market is competitive. There is enormous competition among the vendors owing to the intense market penetration of some existing players in the market expected to grow further. Some major players include Applied Materials Inc., Lam Research Corporation, and Tokyo Electron Ltd., among others.

  • March 2022 - Samco, an etching, deposition, and surface treatment processing equipment manufacturer, introduced the new plasma etching cluster tool 'Cluster H.' By leveraging its cutting-edge plasma technology, Cluster H provides the full-scale production capabilities for compound semiconductor devices such as SiC/GaN power devices, high-frequency filters, GaAs VCSELs, CMOS image sensors, micro-OLED/LED, and advanced packaging.
  • March 2022 - APTC, a dry etching equipment maker, announced that it is developing a 300mm oxide etching equipment to offer for a demo text in 2023. APTC offered etching equipment that uses a plasma source to etch polysilicon first. With this, the company focuses on further expanding its presence in the dry etching equipment market.

Plasma Etching Equipment Market Leaders

  1. Lam Research Corporation

  2. Applied Materials Inc.

  3. Tokyo Electron Ltd

  4. SPTS Technologies (KLA company)

  5. Oxford Instruments PLC

  6. *Disclaimer: Major Players sorted in no particular order
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Plasma Etching Equipment Market News

  • February 2022 - Lam Research Corporation, a plasma etch and deposition tool manufacturer, announced the Syndion GP, a new product designed to enable chipmakers to develop next-generation power management integrated circuits and power devices using deep silicon etch technology. According to the company, Syndion GP can provide good control of the plasma across the wafer by controlling the distribution of ions and radicals for the deep silicon etch (DRIE) process.
  • December 2021 - Tokyo Electron launched Impressio 2400 PICP Pro, a plasma etch system for processing 8th generation glass substrates featuring the new PICP Pro chamber for high-resolution processes.

Plasma Etching Equipment Market Report - Table of Contents

1. INTRODUCTION

  • 1.1 Study Assumptions and Market Definition
  • 1.2 Scope of the Study

2. RESEARCH METHODOLOGY

3. EXECUTIVE SUMMARY

4. MARKET INSIGHTS

  • 4.1 Market Overview
  • 4.2 Industry Value Chain Analysis
  • 4.3 Industry Attractiveness - Porter's Five Forces Analysis
    • 4.3.1 Threat of New Entrants
    • 4.3.2 Bargaining Power of Buyers
    • 4.3.3 Bargaining Power of Suppliers
    • 4.3.4 Threat of Substitute Products
    • 4.3.5 Intensity of Competitive Rivalry
  • 4.4 Impact of COVID-19 on the Market

5. MARKET DYNAMICS

  • 5.1 Market Drivers
    • 5.1.1 Growth of the Semiconductor Industry
    • 5.1.2 Rising Demand for Compact and Energy Efficient Electronic Devices
  • 5.2 Market Restraints
    • 5.2.1 Growing Complexities Related to Miniaturized Structures of Circuits

6. MARKET SEGMENTATION

  • 6.1 By Type
    • 6.1.1 Reactive Ion Etching (RIE)
    • 6.1.2 Inductively Coupled Plasma Etching (ICP)
    • 6.1.3 Deep Reactive Ion Etching (DRIE)
    • 6.1.4 Other Types
  • 6.2 By Application
    • 6.2.1 Industrial Applications
    • 6.2.2 Medical Applications
    • 6.2.3 Consumer Electronics
    • 6.2.4 Other Applications
  • 6.3 Geography
    • 6.3.1 North America
    • 6.3.2 Europe
    • 6.3.3 Asia Pacific
    • 6.3.4 Rest of the World

7. COMPETITIVE LANDSCAPE

  • 7.1 Company Profiles
    • 7.1.1 SPTS Technologies (KLA company)
    • 7.1.2 Applied Materials Inc.
    • 7.1.3 Lam Research Corporation
    • 7.1.4 Oxford Instruments PLC
    • 7.1.5 Tokyo Electron Limited
    • 7.1.6 Plasma Etch Inc.
    • 7.1.7 Plasma-Therm LLC
    • 7.1.8 Thierry Corporation
    • 7.1.9 Samco Inc.
    • 7.1.10 Advanced Micro-Fabrication Equipment Inc.
    • 7.1.11 Sentech Instruments GmbH
    • 7.1.12 GigaLane Co. Ltd
  • *List Not Exhaustive

8. INVESTMENT ANALYSIS

9. FUTURE OUTLOOK OF THE MARKET

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Plasma Etching Equipment Industry Segmentation

The scope of the study focuses on the market analysis of plasma etching equipment products worldwide. Market sizing encompasses the revenue generated through plasma etching equipment products analyzed worldwide and sold by various market players. The study also tracks the key market parameters, underlying growth influencers, and major vendors operating in the industry, which supports the market estimations and growth rates over the forecast period. the study further analyzes the overall impact of COVID-19 on the ecosystem. The report's scope encompasses market sizing and forecast for segmentation by type, application, and geography.

By Type Reactive Ion Etching (RIE)
Inductively Coupled Plasma Etching (ICP)
Deep Reactive Ion Etching (DRIE)
Other Types
By Application Industrial Applications
Medical Applications
Consumer Electronics
Other Applications
Geography North America
Europe
Asia Pacific
Rest of the World
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Plasma Etching Equipment Market Research FAQs

What is the current Plasma Etching Equipment Market size?

The Plasma Etching Equipment Market is projected to register a CAGR of 7.8% during the forecast period (2025-2030)

Who are the key players in Plasma Etching Equipment Market?

Lam Research Corporation, Applied Materials Inc., Tokyo Electron Ltd, SPTS Technologies (KLA company) and Oxford Instruments PLC are the major companies operating in the Plasma Etching Equipment Market.

Which is the fastest growing region in Plasma Etching Equipment Market?

Asia Pacific is estimated to grow at the highest CAGR over the forecast period (2025-2030).

Which region has the biggest share in Plasma Etching Equipment Market?

In 2025, the Asia Pacific accounts for the largest market share in Plasma Etching Equipment Market.

What years does this Plasma Etching Equipment Market cover?

The report covers the Plasma Etching Equipment Market historical market size for years: 2019, 2020, 2021, 2022, 2023 and 2024. The report also forecasts the Plasma Etching Equipment Market size for years: 2025, 2026, 2027, 2028, 2029 and 2030.

Plasma Etching Equipment Industry Report

Statistics for the 2025 Plasma Etching Equipment market share, size and revenue growth rate, created by Mordor Intelligence™ Industry Reports. Plasma Etching Equipment analysis includes a market forecast outlook for 2025 to 2030 and historical overview. Get a sample of this industry analysis as a free report PDF download.

Plasma Etching Equipment Market Report Snapshots

Plasma Etching Equipment Market Size & Share Analysis - Growth Trends & Forecasts (2025 - 2030)